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Title:
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Deposition of hydrogenated amorphous silicon using modulated radio-frequency plasmas*
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Author(s):
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Published by:
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Publication date:
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ECN
Solar Energy
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1-2-2002
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ECN report number:
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Document type:
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ECN---02-001
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Other
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Number of pages:
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Full text:
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127
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Download PDF
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Abstract:
Not available
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