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Title:
Deposition of hydrogenated amorphous silicon using modulated radio-frequency plasmas*

Author(s):
Biebericher, A.C.W.

Published by:	Publication date:
ECN Solar Energy	1-2-2002

ECN report number:	Document type:
ECN---02-001	Other

Number of pages:	Full text:
127	Download PDF

Abstract:
Not available