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Title:
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Remote linear radio frequency PECVD deposited high quality a-Si:H(p) layers and their application in Si heterojunction structures
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Author(s):
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Published by:
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Publication date:
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ECN
Solar Energy
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9-6-2009
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ECN report number:
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Document type:
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ECN-M--09-074
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Conference Paper
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Number of pages:
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Full text:
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5
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Download PDF
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Presented at: 34th IEEE Photovoltaic Specialists Conference, Philadelphia, USA, 7-12 juni 2009.
Abstract:
In this paper, we report on deposition and properties of high quality boron doped p-type amorphous Si (a-Si:H(p)) layers on n-type float
zone Si(100) wafers by remote linear radio frequency plasma-enhanced CVD. The a-Si:H(p)layers show excellent surface passivation that is
comparable to the one of a-Si:H intrinsic layers (a-Si:H(i)), and high stability of the passivation when stored in the dark . Additionally, the measured dark conductivity of deposited a-Si(p) is increased up to
>7×10-6 S/cm by annealing. In a Si heterojunction cell structure, the a-Si:H(p) layer will be the emitter on an n-type base wafer. The effective lifetime of test structures of a-Si(p)/c-Si(n)/a-Si(n) has
approached 1 ms, and a high pseudo fill factor and open circuit voltage have been obtained from a SunsVoc measurement. We conclude that these
a-Si:H(p) layers are very promising for the application in high performance silicon heterojunction solar cells without using an intermediate a-Si:H(i) layer.
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