Publications from author Devilee, C.
Soppe, W.J.; Aken, B.B. van; Dorenkamper, M.S.; Devilee, C.; Heijna, M.; Loffler, J.; Pex, P.P.A.C.;
De Flexicoat-300: een roll-to-roll PECVD systeem voor fabricage van dunne film silicium zonnecellen op folie
ECN-V--12-007
maart 2012;
7 pag.
Published in: NEVAC blad (Nederlandse Vacuümvereniging), 2012, Ed.1, p.30-39.
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Wu, Y.; Boulif, K.; Devilee, C.; Dissel, M.; Dörenkämper, M.S.; Soppe, W.J.; Weeber, A.W.; Geerligs, L.J.;
Development of n-type silicon heterojunction solar cells by using novel linear remote rf PECVD a-Si:H deposition
ECN-M--10-012
september 2010;
4 pag.
Presented at: 25th European Photovoltaic Solar Energy Conference and Exhibition - 5th World Conference on Photovoltaic Energy Conversion, Valencia, Spain, 6-10 september 2010.
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Aken, B.B. van; Devilee, C.; Dörenkämper, M.S.; Heijna, M.; Löffler, J.; Soppe, W.J.;
Inline processed flexible thin film silicon solar cells using linear PECVD sources
ECN-M--10-023
september 2010;
4 pag.
Presented at: 25th European Photovoltaic Solar Energy Conference and Exhibition - 5th World Conference on Photovoltaic Energy Conversion, Valencia, Spain, 6-10 september 2010.
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Soppe, W.J.; Borg, H.; Aken, B.B. van; Devilee, C.; Dörenkämper, M.S.; Goris, M.J.A.A.; Heijna, M.; Löffler, J.; Peeters, P.;
Roll to roll fabrication of thin film silicon solar cells on nano-textured substrates
ECN-M--10-001
januari 2010;
20 pag.
Presented at: IEEE International NanoElectronics Conference (INEC) 2010, Hong Kong, China, 3-8 januari 2010.
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Soppe, W.J.; Aken, B.B. van; Dörenkämper, M.S.; Devilee, C.; Heijna, M.; Löffler, J.;
Roll to roll fabrication process of thin film silicon solar cells on steel foil
ECN-M--09-025
september 2009;
4 pag.
Presented at: 24th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg, Germany, 21-25 september 2009.
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Wu, Y.; Devilee, C.; Aken, B.B. van; Boulif, K.; Soppe, W.J.; Weeber, A.W.; Geerligs, L.J.;
Remote linear RF-PECVD deposited high quality a-Si:H(P) layers and application in Si heterojunction structures
ECN-M--09-031
september 2009;
5 pag.
Presented at: 24th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg, Germany, 21-25 september 2009.
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Wu, Y.; Devilee, C.; Aken, B.B. van; Boulif, K.; Soppe, W.J.; Weeber, A.W.; Geerligs, L.J.;
Remote linear radio frequency PECVD deposited high quality a-Si:H(p) layers and their application in Si heterojunction structures
ECN-M--09-074
juni 2009;
5 pag.
Presented at: 34th IEEE Photovoltaic Specialists Conference, Philadelphia, USA, 7-12 juni 2009.
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Aken, B.B. van; Dörenkämper, M.S.; Devilee, C.; Heijna, M.; Löffler, J.; Soppe, W.J.;
Roll to roll fabrication process of thin film silicon solar cells on steel foil
ECN-M--09-077
juni 2009;
5 pag.
Presented at: 34th IEEE Photovoltaic Specialists Conference, Philadelphia, USA, 7-12 juni 2009.
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Aken, B.B. van; Devilee, C.; Dörenkämper, M.S.; Heijna, M.; Löffler, J.; Soppe, W.J.;
Pilot roll-to-roll PECVD system for fabrication of thin film Si solar cells
ECN-M--08-023
maart 2008;
4 pag.
Presented at: The International Conference on Coatings on Glass and Plastics (ICCG), Eindhoven, The Netherlands, 15-19 juni 2008.
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Aken, B.B. van; Leegwater, H.; Dörenkämper, M.S.; Devilee, C.; Loffler, J.; Heijna, M.; Soppe, W.J.;
MW plasma enhanced CVD of intrinsic Si for thin film solar cells
ECN-M--08-024
maart 2008;
7 pag.
Presented at: MRS Spring Meeting, San Francisco, USA, 25-27 maart 2008.
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Aken, B.B. van; Dörenkämper, M.S.; Devilee, C.; Heijna, M.; Löffler, J.; Soppe, W.J.;
Fabrication of a-Si solar cells with RF- and MW-PECVD
ECN-M--08-019
februari 2008;
4 pag.
Presented at: 23rd European Photovoltaic Solar Energy Conference and Exhibition, Valencia, Spain, 1-5 september 2008.
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Aken, B.B. van; Devilee, C.; Dörenkämper, M.S.; Geusebroek, M.; Heijna, M.; Löffler, J.; Soppe, W.J.;
Deposition of a-Si:H and µc-Si:H using a novel linear RF Source
ECN-M--07-086
augustus 2007;
0 pag.
Presented at: 22nd European Photovoltaic Solar Energy Conference and Exhibition, Milan, Italy, 3-7 september 2007.
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Soppe, W.J.; Aken, B.B. van; Devilee, C.; Schlemm, H.;
A novel linear RF Source for PECVD of Thin-Film Silicon
ECN-M--07-089
augustus 2007;
0 pag.
Presented at: 22nd European Photovoltaic Solar Energy Conference and Exhibition, Milan, Italy, 3-7 september 2007.
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Aken, B.B. van; Devilee, C.; Dörenkämper, M.S.; Geusebroek, M.; Heijna, M.; Löffler, J.; Soppe, W.J.;
Deposition of phosphorus doped a-Si:H and u-Si:H using a novel linear RF source
ECN-M--07-034
maart 2007;
5 pag.
Presented at: ICANS 22 Symposium, Breckenridge, USA, 19-24 augustus 2007.
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Aken, B.B. van; Devilee, C.; Dörenkämper, M.S.; Geusebroek, M.; Heijna, M.; Löffler, J.; Soppe, W.J.;
PECVD deposition of a-Si:H and uc-Si:H using linear RF source
ECN-M--07-035
maart 2007;
8 pag.
Presented at: SPIE Symposium, San Diego, USA, 26-30 augustus 2007.
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Löffler, J.; Devilee, C.; Geusebroek, M.; Soppe, W.J.; Muffler, H.J.;
Deposition of µc-Si:H by Microwave PECVD - Influence of process conditions on layer properties
ECN-RX--06-029
september 2006;
4 pag.
Presented at: 21st European Photovoltaic Solar Energy Conference and Exhibition, Dresden, Germany, 4-8 september 2006.
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Soppe, W.J.; Devilee, C.; Geusebroek, M.; Löffler, J.; Muffler, H.J.;
The effect of argon dilution on deposition of microcrystalline silicon by microwave plasma enhanced chemical vapor deposition
ECN-RX--06-015
juni 2006;
20 pag.
Presented at: E-MRS, European Materials Research Society, Nice, France, 29 mei 2006-2 juni 2006.
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Späth, M.; Löffler, J.; Soppe, W.J.; Devilee, C.; Niquille, X.;
Barrier layers deposited at low temperature on metal carrier foil for the use of uc-Si solar cells
ECN-RX--05-107
oktober 2005;
2 pag.
Presented at: 15th International Photovoltaic Science and Engineering Conference & Solar Energy Exhibition, Shanghai, China, 10-15 oktober 2005.
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Soppe, W.J.; Devilee, C.; Muffler, H.J.; Gajovic, A.; Dubcek, P.; Gracin, D.;
Large area, high rate deposition of uc-Si by MicroWave PECVD
ECN-RX--05-108
oktober 2005;
2 pag.
Presented at: 15th International Photovoltaic Science and Engineering Conference & Solar Energy Exhibition, Shanghai, China, 10-15 oktober 2005.
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Löffler, J.; Muffler, H.J.; Devilee, C.; Gajovic, A.; Dubcek, P.; Gracin, D.; Soppe, W.J.;
Large area deposition of microcrystalline silicon by microwave PECVD
ECN-RX--05-150
september 2005;
4 pag.
Presented at: 21st International Conference on Amorphous and Nanocrystalline Semiconductors - ICANS 21, Lisbon, Portugal, 5-9 september 2005.
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Soppe, W.J.; Muffler, H.J.; Biebericher, A.C.W.; Devilee, C.; Burgers, A.R.; Poruba, A.; Hodakova, L.; Vanecek, M.;
Optical and structural properties of microcrystalline silicon, grown by microwave PECVD
ECN-RX--05-003
juni 2005;
4 pag.
Presented at: 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, Spain, 6-10 juni 2005.
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Biebericher, A.C.W.; Burgers, A.R.; Devilee, C.; Soppe, W.J.;
Effects of plasma conditions on density of microcrystalline silicon
ECN-RX--04-066
juni 2004;
4 pag.
Presented at: 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 7-11 juni 2004.
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Soppe, W.J.; Devilee, C.; Biebericher, A.C.W.; Smit, C.; Swaaij, R.A.C.M.M. van; Houston, I.; Sanden, M.C.M. van de; Gordijn, A.; Rath, J.K.; Schropp, R.E.I.; Donker, H.; Goossens, A.;
Final Report MissionN & Miracle : Micro Crystalline Silicon in the Netherlands
ECN-C--04-009
2004;
100 pag.
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Soppe, W.J.; Biebericher, A.C.W.; Devilee, C.; Donker, H.; Schlemm, H.;
High rate growth of micro-crystalline silicon by microwave-PECVD
ECN-RX--03-020
mei 2003;
4 pag.
Presented at: 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 11-18 mei 2003.
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Soppe, W.J.; Devilee, C.; Rieffe, H.C.; Schiermeier, S.E.A.; Bultman, J.H.; Weeber, A.W.; Hong, J.; Kessels, W.M.M.; Sanden, M.C.M. van de; Arnoldbik, W.M.; Schlemm, H.;
On combining surface and bulk passivation of SiNx: H layers for mc-Si solar cells
ECN-RX--02-018
mei 2002;
4 pag.
Presented at: 29th IEEE Photovoltaic Specialists Conference, New Orleans, USA, 20-24 mei 2002.
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Soppe, W.J.; Devilee, C.; Schiermeier, S.E.A.; Biebericher, A.C.W.; Donker, H.; Rath, J.K.;
Microwave PECVD of micro-crystalline silicon
ECN-RX--02-019
mei 2002;
4 pag.
Presented at: 29th IEEE Photovoltaic Specialists Conference, New Orleans, USA, 20-24 mei 2002.
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Soppe, W.J.; Devilee, C.; Schiermeier, S.E.A.; Donker, H.; Rath, J.K.;
Microwave PECVD of Micro-Crystalline Silicon
ECN-RX--02-011
april 2002;
6 pag.
Presented at: 2002 MRS Spring Meeting, San Francisco, USA, 1-5 april 2002.
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Soppe, W.J.; Devilee, C.; Schiermeier, S.E.A.; Weeber, A.W.; Hong, J.; Kessels, W.M.M.; Sanden, M.C.M. van de; Arnoldbik, W.M.;
Bulk and surface passivation by silicon nitride grown by microwave enhanced PECVD
ECN-RX--01-022
oktober 2001;
4 pag.
Presented at: 17th European Photovoltaic Solar Energy Conference, Munich, Germany, 22-26 oktober 2001.
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