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ECN publication
Pilot roll-to-roll PECVD system for fabrication of thin film Si solar cells
Published by: Publication date:
ECN Solar Energy 14-3-2008
ECN report number: Document type:
ECN-M--08-023 Conference Paper
Number of pages: Full text:
4 Download PDF  

Presented at: The International Conference on Coatings on Glass and Plastics (ICCG), Eindhoven, The Netherlands, 15-19 juni 2008.

Our aim is the development of high-throughput production technology for high efficiency, amorphous and microcrystalline thin film silicon solar cells on flexible substrates. A roll-to-roll system, the FLEXICOAT300, is developed with three deposition chambers for the continuous deposition of, respectively, n-type Si, intrinsic Si and p-type Si. Novel RF and MW sources for plasma enhanced chemical vapour deposition (PECVD) are introduced in the roll-to-roll coater. The first trial depositions of a-Si solar cells show a promising efficiency of > 4 %.

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