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Title:
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Pilot roll-to-roll PECVD system for fabrication of thin film Si solar cells
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Author(s):
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Published by:
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Publication date:
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ECN
Solar Energy
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14-3-2008
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ECN report number:
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Document type:
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ECN-M--08-023
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Conference Paper
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Number of pages:
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Full text:
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4
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Download PDF
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Presented at: The International Conference on Coatings on Glass and Plastics (ICCG), Eindhoven, The Netherlands, 15-19 juni 2008.
Abstract:
Our aim is the development of high-throughput production technology for high efficiency, amorphous and microcrystalline thin film silicon solar cells on flexible substrates. A roll-to-roll system, the FLEXICOAT300, is developed with three deposition chambers for the continuous deposition of, respectively, n-type Si, intrinsic Si and p-type Si. Novel RF and MW sources for plasma enhanced chemical vapour deposition (PECVD) are introduced in the roll-to-roll coater. The first trial depositions of a-Si solar cells show a promising efficiency of > 4 %.
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