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Title:
De Flexicoat-300: een roll-to-roll PECVD systeem voor fabricage van dunne film silicium zonnecellen op folie

Author(s):
Soppe, W.J.; Aken, B.B. van; Dorenkamper, M.S.; Devilee, C.; Heijna, M.; Loffler, J.; Pex, P.P.A.C.

Published by:	Publication date:
ECN Solar Energy	15-3-2012

ECN report number:	Document type:
ECN-V--12-007	Article

Number of pages:	Full text:
7	Download PDF

Published in: NEVAC blad (Nederlandse Vacuümvereniging), , 2012, Vol.1, p.30-39.

Abstract:
n.a.