Skip Navigation Links.

Search for publications:

Limit search to the fields

ECN publication
17% mc-Si solar cell efficiency using completely in-line processing with improved texturing and screen-printed contacts on lowly doped emitters
Published by: Publication date:
ECN Solar Energy 1-6-2005
ECN report number: Document type:
ECN-RX--05-008 Conference Paper
Number of pages: Full text:
6 Download PDF  

Presented at: 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, Spain, 6-10 juni 2005.

: A simple in-line industrial process has been developed for commercial multicrystalline silicon (mc-Si) which results in solar cells with an average efficiency of 16.5%. The best cell has an independently confirmed efficiency of 17.0%. These are the highest efficiencies reported for full inline processing. The process consists of an acidic etch for texturing, homogeneous spin-on phosphorous and a belt furnace emitter diffusion, MicroWave PECVD of silicon nitride layers, and screen-printed metallization. The silicon nitride layer serves as antireflection coating and provides bulk and surface passivation. Detailed characterization and computer simulation show that implementation of already proven technologies in the current cell processing can lead to efficiencies around 18%.

Back to List