Publications from author Steiner, A.
Soppe, W.J.; Duijvelaar, B.G.; Schiermeier, S.E.A.; Weeber, A.W.; Steiner, A.; Schuurmans, F.M.;
A high throughput PECVD reactor for deposition of passivating SiN layers
ECN-RX--00-021
mei 2000;
4 pag.
Presented at: 16th European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, Scotland, 1-5 mei 2000.
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