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ECN publication
Hydrogen passivation of iron in multicrystalline silicon
Published by: Publication date:
ECN Solar Energy 1-8-2003
ECN report number: Document type:
ECN-RX--03-055 Conference Paper
Number of pages: Full text:
4 Download PDF  

Presented at: 13th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Vail CO, USA, 10-13 augustus 2003.

Concentrations of interstitially dissolved Fe can be measured by lifetimemeasurements before and after dissociation of FeB pairs. It allows the measurement of iron concentrations as low as 5x1010 cm-3. The technique is applied to determine the change in Fe concentration after different solar cell process steps. In particular, hydrogen passivation of iron in multicrystalline silicon wafers is investigated. The results indicate that the passivation can be accurately followed with this technique.

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