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ECN publication
Effect of different firing profiles on layer characteristics and passivation of industrial ETP deposited silicon nitride films
Weeber, A.W.; Erven, A.J.M. van; Bosch, R.C.M.; Bijker, M.D.
Published by: Publication date:
ECN Solar Energy 1-6-2004
ECN report number: Document type:
ECN-RX--04-099 Conference Paper
Number of pages: Full text:
4 Download PDF  

Presented at: 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 7-11 juni 2004.

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