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Title:
Chemical vapor precipitation of submicron titanium nitride powder. : Paper presented at EURO CVD 8, Glasgow, 9-13 september 1991

Author(s):
Dekker, J.P.; Put, P.J. van der; Nieuwenhuis, R.R.; Veringa, H.J.; Schoonman, J.

Published by:	Publication date:
ECN ECN	1991

ECN report number:	Document type:
ECN-RX--91-085	Other

Number of pages:	Full text:
0	Download PDF

Abstract:
No summary available.