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Title/Abstract
Publicationnumber
Author
ECN publication
Title:
Chemical vapor precipitation of submicron titanium nitride powder. : Paper presented at EURO CVD 8, Glasgow, 9-13 september 1991
Author(s):
Dekker, J.P.
;
Put, P.J. van der
;
Nieuwenhuis, R.R.
;
Veringa, H.J.
;
Schoonman, J.
Published by:
Publication date:
ECN
ECN
1991
ECN report number:
Document type:
ECN-RX--91-085
Other
Number of pages:
Full text:
0
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