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ECN publication
Title:
Very low surface recombination velocities on 2.5 cm Si wafers, obtained with low-temperature PECVD of Si-oxide and Si-nitride
 
Author(s):
Leguijt, C.; Lölgen, P.; Eikelboom, J.A.; Amesz, P.H.; Steeman, R.A.; Sinke, W.C.; Sarro, P.M.; Verhoef, L.A.; Michiels, P.P.; Chen, Z.H.; Rohatgi, A.
 
Published by: Publication date:
ECN ECN 1993
 
ECN report number: Document type:
ECN-RX--93-098 Other
 
Number of pages: Full text:
3 Download PDF  

Abstract:
No summary available.


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