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Title/Abstract
Publicationnumber
Author
ECN publication
Title:
Very low surface recombination velocities on 2.5 cm Si wafers, obtained with low-temperature PECVD of Si-oxide and Si-nitride
Author(s):
Leguijt, C.
;
Lölgen, P.
;
Eikelboom, J.A.
;
Amesz, P.H.
;
Steeman, R.A.
;
Sinke, W.C.
;
Sarro, P.M.
;
Verhoef, L.A.
;
Michiels, P.P.
;
Chen, Z.H.
;
Rohatgi, A.
Published by:
Publication date:
ECN
ECN
1993
ECN report number:
Document type:
ECN-RX--93-098
Other
Number of pages:
Full text:
3
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Abstract:
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