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Title:
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Silicon Nitride at High Deposition Rate by Hot-Wire Chemical Vapor Deposition as Passivating and Antireflection Layer on Multicrystalline Silicon Solar Cells
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Author(s):
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Weeber, A.W.; Rieffe, H.C.; Soppe, W.J.; Werf, C.H.M. van der; Goldbach, H.D.; Löffler, J.; Scarfó, A.; Kylner, A.M.C.; Stannowski, B.; Arnoldbik, W.M.; Rath, J.K.; Schropp, R.E.I.
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Published by:
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Publication date:
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ECN
Solar Energy
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1-8-2004
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ECN report number:
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Document type:
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ECN-RX--04-098
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Conference Paper
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Number of pages:
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Full text:
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4
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Download PDF
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Presented at: 3rd International Conference on Hot-Wire CVD (Cat-CVD) Process, Utrecht, The Netherlands, 23-27 augustus 2004.
Abstract:
No summary available.
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