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Publications from author Leegwater, H. 
Aken, B.B. van; Leegwater, H.; Dörenkämper, M.S.; Devilee, C.; Loffler, J.; Heijna, M.; Soppe, W.J.;
MW plasma enhanced CVD of intrinsic Si for thin film solar cells
ECN-M--08-024 EN maart 2008; 7 pag.
Presented at: MRS Spring Meeting, San Francisco, USA, 25-27 maart 2008.