Publications

Skip Navigation Links.

Search for publications:


Limit search to the fields

Publications from author Deligiannis, D. 
Spinelli, P.; Danzl, F.J.K.; Deligiannis, D.; Guillevin, N.; Burgers, A.R.; Sawallich, S.; Nagel, M.; Cesar, I.;
High resolation THz scanning for optimization of dielectric layer opening process on doped Si surfaces
ECN-M--17-016 EN juni 2017; 5 pag.