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ECN publication
16% mc-Si cell efficiencies using industrial in-line processing
Published by: Publication date:
ECN Solar Energy 1-6-2004
ECN report number: Document type:
ECN-RX--04-064 Conference Paper
Number of pages: Full text:
4 Download PDF  

Presented at: 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 7-11 juni 2004.

A simple in-line industrial process is developed for multicrystalline silicon (mc-Si) solar cells with an average efficiency of 16%. The best cell has a confirmed efficiency of 16.5%. The process consists of an acidic etch for texturing, homogeneous spin-on phosphorous and a belt furnace emitter diffusion, MicroWave PECVD of silicon nitride layers, and screen-printed metallization. The silicon nitride layer serves as antireflection coating and provides bulk and surface passivation. We demonstrate that the effective lifetime of Float Zone Si does not degrade during this in-line process, which means that the process can be applied to obtain high-efficiency solar cells. Detailled characterization and computer simulation showed that implementation of already proven technologies in the current cell processing could lead to efficiencies around 18%.

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