Skip Navigation Links.

Search for publications:

Limit search to the fields

ECN publication
Straightforward in-line processing for a 16.8% efficient mc-Si solar cell
Published by: Publication date:
ECN Solar Energy 1-1-2005
ECN report number: Document type:
ECN-RX--05-049 Conference Paper
Number of pages: Full text:
4 Download PDF  

Presented at: 31st IEEE Photovoltaic Specialists Conference, Orlando, FL, USA, 3-5 januari 2005.


A simple in-line industrial process has been developed for commercial multicrystalline silicon (mc-Si) which results in solar cells with an average efficiency of 16.5%. The best cell has an efficiency of 16.8%. These are the highest efficiencies reported for full inline processing. The process consists of an acidic etch for texturing, homogeneous spin-on phosphorous and a belt furnace emitter diffusion, MicroWave PECVD for silicon nitride layers, and screen-printed metallization. The silicon nitride layer serves as antireflection coating and provides bulk and surface passivation. Detailed characterization and computer simulation showed that implementation of already proven technologies in the current cell processing could lead to efficiencies close to 18%.

Back to List