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ECN publication
Title:
De Flexicoat-300: een roll-to-roll PECVD systeem voor fabricage van dunne film silicium zonnecellen op folie
 
Author(s):
Soppe, W.J.; Aken, B.B. van; Dorenkamper, M.S.; Devilee, C.; Heijna, M.; Loffler, J.; Pex, P.P.A.C.
 
Published by: Publication date:
ECN Solar Energy 15-3-2012
 
ECN report number: Document type:
ECN-V--12-007 Article
 
Number of pages: Full text:
7 Download PDF  

Published in: NEVAC blad (Nederlandse Vacuümvereniging), , 2012, Vol.1, p.30-39.

Abstract:
n.a.


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