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Title:
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16% mc-Si cell efficiencies using industrial in-line processing
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Author(s):
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Published by:
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Publication date:
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ECN
Solar Energy
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1-6-2004
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ECN report number:
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Document type:
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ECN-RX--04-064
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Conference Paper
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Number of pages:
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Full text:
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4
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Download PDF
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Presented at: 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 7-11 juni 2004.
Abstract:
A simple
in-line industrial process is developed for multicrystalline silicon
(mc-Si) solar cells with an average efficiency of 16%. The best cell
has a confirmed efficiency of 16.5%. The process consists of an acidic
etch for texturing, homogeneous spin-on phosphorous and a belt furnace
emitter diffusion, MicroWave PECVD of silicon nitride layers, and screen-printed
metallization. The silicon nitride layer serves as antireflection coating
and provides bulk and surface passivation. We demonstrate that the effective
lifetime of Float Zone Si does not degrade during this in-line process,
which means that the process can be applied to obtain high-efficiency
solar cells. Detailled characterization and computer simulation showed
that implementation of already proven technologies in the current cell
processing could lead to efficiencies around 18%.
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