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Title:
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17% mc-Si solar cell efficiency using completely in-line processing with improved texturing and screen-printed contacts on lowly doped emitters
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Author(s):
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Published by:
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Publication date:
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ECN
Solar Energy
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1-6-2005
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ECN report number:
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Document type:
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ECN-RX--05-008
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Conference Paper
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Number of pages:
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Full text:
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6
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Download PDF
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Presented at: 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, Spain, 6-10 juni 2005.
Abstract:
: A
simple in-line industrial process has been developed for commercial
multicrystalline silicon (mc-Si) which results in solar cells with an
average efficiency of 16.5%. The best cell has an independently confirmed
efficiency of 17.0%. These are the highest efficiencies reported for
full inline processing. The process consists of an acidic etch for texturing,
homogeneous spin-on phosphorous and a belt furnace emitter diffusion,
MicroWave PECVD of silicon nitride layers, and screen-printed metallization.
The silicon nitride layer serves as antireflection coating and provides
bulk and surface passivation. Detailed characterization and computer
simulation show that implementation of already proven technologies in
the current cell processing can lead to efficiencies around 18%.
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